Analysis and Inverse Dynamic Model of a Miniaturized Robot Structure

The Parvus is a miniaturized precision robot driven by micro drives. The robot is well suited for pick-and-place applications with a repeatability in the range of a few micrometers. Due to the miniaturization of the machine parts used in the Parvus, disturbing effects in the robot drives in combination with load torque cause dynamic vibrations of the robot structure. To optimize the dynamic behavior of the robot, the common approach of a computed torque feed forward control (CTFF) strategy is investigated. The results of the inverse dynamic model show why this control strategy is not applicable in this case, but gives insight for other approaches.