Automated Assembly of Hybrid Microsystems
| Kategorien |
Konferenz |
| Jahr | 2007 |
| Autorinnen/Autoren | Schöttler, K.; Rathmann, S.; Raatz, A.; Hesselbach, J. |
| Veröffentlicht in | Proc. of 7th euspen International Conference, Bremen, 2007, pp. 364 V2 - 367 V2 |
Beschreibung
The paper describes the design of a system for the automated assembly of hybrid microsystems and the accuracies of the components. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process. While the object sizes reach centimeter range, they have to be assembled with an assembly accuracy of only a few micrometers. A relative positioning accuracy of 0.8 µm is reached in this process.
| ISBN | 978-0-9553082-2-2 |
| DOI | 10.15488/13313 |
