Automated Assembly of Hybrid Microsystems

Automated Assembly of Hybrid Microsystems

Kategorien Konferenz
Jahr 2007
Autoren Schöttler, K.; Rathmann, S.; Raatz, A.; Hesselbach, J.
Veröffentlicht in Proc. of 7th euspen International Conference, Bremen, 2007, pp. 364 V2 - 367 V2

The paper describes the design of a system for the automated assembly of hybrid microsystems and the accuracies of the components. The influences on the accuracy will be analyzed on the basis of an example for an automated assembly process. While the object sizes reach centimeter range, they have to be assembled with an assembly accuracy of only a few micrometers. A relative positioning accuracy of 0.8 µm is reached in this process.

ISBN 978-0-9553082-2-2
DOI 10.15488/13313