Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation
| Categories |
Konferenz (reviewed) |
| Year | 2011 |
| Authors | Claverley, J. D.; Sheu, D.-Y.; Burisch, A.; Leach, R. K.; Raatz, A. |
| Published in | International Symposium on Assembly and Manufacturing ISAM2011, Tampere, Finnland, 2011 |
Description
In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.
| ISBN | 978-1-61284-343-8 |
| DOI | 10.1109/ISAM.2011.5942327 |
