Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System

Research and Development in recent years has led to first commercially available, magnetically levitated planar motor systems. Considering the advantages of such systems, they perfectly fit as a substitute for multi-axis fine positioning stages in high-volume productions. To address the need for solutions for high-volume packaging of optical devices, we present a novel concept for a micro-assembly station using a planar motor. To qualify a novel, vacuum-operatable planar motor system for our design, we conducted experiments regarding positioning repeatability, positioning noise, and dynamics on a pre-series system.