An Overview of Novel Actuators for Soft Robotics

Assembly of a novel MEMS-based 3D vibrating micro-scale co-ordinate measuring machine probe using desktop factory automation

Categories Konferenz (reviewed)
Year 2011
Authors Claverley, J. D.; Sheu, D.-Y.; Burisch, A.; Leach, R. K.; Raatz, A.
Published in International Symposium on Assembly and Manufacturing ISAM2011, Tampere, Finnland, 2011

In this paper the assembly of a novel micro-scale coordinate measuring machine (CMM) probe is considered. A working micro-scale CMM probe is assembled from a MEMS device and a stylus produced by micro-electro-discharge machining. The production technique of the micro-scale parts is discussed and two methods for assembly are presented.

ISBN 978-1-61284-343-8
DOI 10.1109/ISAM.2011.5942327